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On a finite element method for a compressible viscous flow in a MOCVD reactor

Duque, J

ISLA — Instituto Politécnico de Gestão e Tecnologia

Numerical Methods for Partial Differential Equations, 2005

AbstractWe propose a stable finite element method for approximating the flow of a chemically reacting gas mixture in an MOCVD (metal‐organic chemical vapor deposition) reactor. The flow is governed by the full compressible Navier‐Stokes equations extended by transport equations for the chemical species, the energy equations and the equation of state, together with boundary conditions providing information on the reactor geometry and experimental conditions. The equations form a semilinear system with a constraint for which the corresponding pressure term is not the Lagrangian multiplier. An application of our method to a real world model of growth of GaAs shows the consistency with experimental data. © 2004 Wiley Periodicals, Inc. Numer Methods Partial Differential Eq, 2005

Keywords

#MOCVD reactor #compressible Navier-Stokes equations #finite element analysis #GaAs growth #semiconductor epitaxial growth #species transport equations #energy equation #equation of state #Compressibility #Finite element method #Metalorganic vapour phase epitaxy #Mathematics #Boundary value problem #Lagrange multiplier #Partial differential equation #Flow (mathematics) #Compressible flow

Bibliographic Details

Publication Type Journal article

Publication Year 2005

Journal / Conference / Work Numerical Methods for Partial Differential Equations

Quartile (SCImago) Q1

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On a finite element method for a compressible viscous flow in a MOCVD reactor

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Bibliographic Details

ISLA Authors & Affiliations